Air Preparation Filters
Clean Gas Filter SF
・Cartridge type allows for element replacement (SFA100/200/300, SFB100) ・Compact, disposable type for the semiconductor industry (SFB300, SFC100) |
Type | Series | Operating pressure | Filtration |
---|---|---|---|
Cartridge type Disc | SFA100/200/300 | Max.0.99MPa (Vacuum:1.3×10-6kPa) | 0.01μm (Filtration efficiency 99.99%) |
Cartridge type Straight | SFB100 | Max.0.99MPa (Vacuum:1.3×10-6kPa) | 0.01μm (Filtration efficiency 99.99%) |
Cartridge type Straight | SFB200 | Max.0.99MPa (Vacuum:1.3×10-6kPa) | 120μm |
Disposable type Straight | SFB300 | Max.0.99MPa (Vacuum:1.3×10-6kPa) | 0.01μm (Filtration efficiency 99.99%) |
Disposable type Multiple disc | SFC100 | Max.0.99MPa (Vacuum:1.3×10-6kPa) | 0.01μm (Filtration efficiency 99.99%) |
Tags: Clean Gas Filter SF